期刊
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS
卷 16, 期 2, 页码 70-73出版社
SPRINGER
DOI: 10.4313/TEEM.2015.16.2.70
关键词
Graphene; PLD; Thin film; Without catalytic metal; HOPG
资金
- Inha University [50249-01]
Many studies have used chemical vapor deposition (CVD) to grow graphene. However, CVD is inefficient in terms of production costs, and inefficient for mass production because a transfer process using a catalytic metal is needed. In this study, graphene thin films were grown on single crystal sapphire substrates without a catalytic metal, using pulsed laser deposition (PLD) to resolve these problems. In addition, the growth of graphene using PLD was confirmed to have a close relationship with the substrate temperature.
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