期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 33, 期 6, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.4936068
关键词
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资金
- Dutch Technology Foundation STW part of The Netherlands Organization for Scientific Research (NWO)
- Ministry of Economic Affairs
The authors report the direct-write growth of hammerhead atomic force microscope (AFM) probes by He+ beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+ beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the beam results in the required three-dimensional (hammerhead) shape. The diameter of the needle depends on the ion beam dose, beam dwell time, and speed of the beam movement. A nanoneedle radius below 10nm and a hammerhead smaller than 35 nm have been achieved. This fabrication process is robust and enables precise control over the three-dimensions of the hammerhead AFM probe. Finally, the authors test the capabilities of the fabricated AFM probes for two-dimensional metrology of sidewall angles and line-edge roughness of trenches and shark-fins in silicon. (C) 2015 American Vacuum Society.
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