EXPERIMENTAL INVESTIGATION ON MODE COUPLING OF BULK MODE SILICON MEMS RESONATORS

This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.