期刊
EUROSENSORS 2015
卷 120, 期 -, 页码 206-209出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.proeng.2015.08.611
关键词
MEMS; Microphone; OTP; Programming; High SNR; Sensitivity deviation
This paper describes a novel method for trimming a low noise, differential micro-electromechanical system (MEMS) microphone with a state of the art signal to noise ratio (SNR) of 66 dB(A) and a sensitivity of -38 dBV/Pa @ 1kHz after completing the fabrication process. The method allows compensating the electroacoustic variations caused by process tolerances and reducing specification limits of the microphone sensitivity from +/- 3 dB to +/- 0.5 dB. Trimming is done by programming the bias supply voltage of the capacitive membrane-backplate-system and the gain factor of the output pre-amplifier. Microphone sensitivity can be modified within a range of 11.2 dB. Thus the standard deviation of the sensitivity of a production batch could be reduced from 0.97 dB to 0.11 dB. Furthermore the SNR could be increased to 66.5 dB(A). (C) 2015 The Authors. Published by Elsevier Ltd.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据