期刊
BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN
卷 91, 期 2, 页码 178-186出版社
CHEMICAL SOC JAPAN
DOI: 10.1246/bcsj.20170280
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资金
- KAKENHI [15H03860]
- JSPS KAKENHI [16J05484, 15J05451]
- Research Program of Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials in Network Joint Research Center for Materials and Devices
We developed a UV-curable resin (NL-SU1) suitable for screen printing with laser-drilled polyimide masks and reverse-tone nanoimprint lithography. The viscosity of the UV-curable resin composed of two bisphenol A-based monomers was adjusted to 11.0 Pa.s for the screen printing process. It was determined by photo-differential scanning calorimetry that photoinitiator Irgacure 369 was suitable for high methacrylate consumption in UV curing. The UV-curable resin after curing could be used as a top-coated resist layer on another imprinted resist layer because of its sufficient contrast in oxygen reactive ion etching and argon ion milling. We demonstrated a method for reverse-tone lithography in a print-and-imprint method to fabricate 20-nm-thick and 50-nm-linewide Au split-ring resonator arrays.
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