期刊
APPLIED OPTICS
卷 55, 期 2, 页码 354-359出版社
OPTICAL SOC AMER
DOI: 10.1364/AO.55.000354
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资金
- National Research Foundation of Korea (NRF) [2014R1A2A1A11051576]
- Ministry of Trade, Industry and Energy (MOTIE) [R1416612]
- Interdisciplinary Research Program from the Research Institute of Basic Sciences, Seoul National University
- National Research Foundation of Korea [2014R1A2A1A11051576] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Lambda approximate to 600 nm exhibits a continuous period variation of Delta Lambda = 92 nm across 17 mm width. (C) 2016 Optical Society of America
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