期刊
APPLIED OPTICS
卷 55, 期 1, 页码 110-116出版社
OPTICAL SOC AMER
DOI: 10.1364/AO.55.000110
关键词
-
类别
资金
- National Natural Science Foundation of China (NSFC) [51505452]
A high-speed high-resolution heterodyne interferometer using a laser with low beat frequency is developed. The interferometer has two spatially separated parallel beams with different frequencies. Two interference signals with opposite Doppler shift are optically generated by the interferometric optics. The measurement electronics uses two identical phasemeters for the two opposite interference signals. The two interference signals are selectively used according to the speed of the target, which makes sure that the Doppler shift of the selected signal is always positive, so that the measurable speed is no longer limited by the beat frequency of the laser source. Experimental results show that the measurement resolution is 0.62 nm. The measurable speed can exceed the restriction determined by the beat frequency. Compared with a commercial interferometer, the displacement difference is less than 40 nm in a travel range of 900 mm. (C) 2015 Optical Society of America
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据