期刊
APPLIED SURFACE SCIENCE
卷 440, 期 -, 页码 1211-1218出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2018.01.318
关键词
Sn-doped In2O3; Thickness; Cylindrical rotating magnetron sputtering; Preferred orientation; Transparent conducting electrodes
类别
资金
- Korea Institute of Energy Technology Evaluation and Planning (KETEP)
- Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea [20163010012200]
- Technology Innovation Program (or Industrial Strategic Technology Development Program - Ministry of Trade, Industry & Energy (MOTIE, Korea) [10079601]
We report the characteristics of Sn-doped In2O3 (ITO) films intended for use as transparent conducting electrodes; the films were prepared via a five-generation, in-line type, cylindrical, rotating magnetron sputtering (CRMS) system as a function of film thickness. By using a rotating cylindrical ITO target with high usage (similar to 80%), we prepared high conductivity, transparent ITO films on five-generation size glass. The effects of film thickness on the electrical, optical, morphological, and structural properties of CRMS-grown ITO films are investigated in detail to correlate the thickness and performance of ITO films. The preferred orientation changed from the (222) to the (400) plane with increasing thickness of ITO is attributed to the stability of the (400) plane against resputtering during the CRMS process. Based on X-ray diffraction, surface field emission scanning electron microscopy, and cross-sectional transmission electron microscopy, we suggest a possible mechanism to explain the preferred orientation and effects of film thickness on the performance of CRMS-grown ITO films. (C) 2018 Elsevier B.V. All rights reserved.
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