期刊
ACS APPLIED MATERIALS & INTERFACES
卷 7, 期 49, 页码 27467-27472出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b09454
关键词
nanostructuring near-field; dielectric microspheres; optical trap; femtosecond lasers; laser-assisted chemical etching; TOF-SIMS; AFM
资金
- Russian Academy of Science Presidium program [1]
- Russian Foundation for the Basic Research [14-03-00546 a, 13-02-12433 (ofi_m2)]
- Russian President Grant [MK-5486.2014.2]
- Russian Science Foundation [14-33-00017]
Laser processing with optically trapped microspheres is a promising tool for nanopatterning at subdiffraction-limited resolution in a wide range of technological and biomedical applications. In this paper, we investigate subdiffraction-limited structuring of borosilicate glass with femtosecond pulses in the near-field of optically trapped microspheres combined with chemical postprocessing. The glass surface was processed by single laser pulses at 780 nm focused by silica microspheres and then subjected to selective etching in KOH, which produced pits in the laser-affected zones (LAZs). Chemical postprocessing allowed obtaining structures with better resolution and reproducibility. We demonstrate production of reproducible pits with diameters as small as 70 nm (lambda/11). Complex two-dimensional structures with 100 nm (lambda/8) resolution were written on the glass surface point by point with microspheres manipulated by optical tweezers. Furthermore, the mechanism of laser modification underlying selective etching was investigated with mass spectrum analysis. We propose that the increased etching rate of laser-treated glass results from changes in its chemical composition and oxygen deficiency.
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