期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 26, 期 10, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/26/10/104001
关键词
reconfigurable filters; piezoelectric transducers; radiofrequency microelectromechanical systems; aluminum nitride resonators
类别
资金
- Laboratory Directed Research and Development (LDRD) program at Sandia National Laboratories
- DARPA RF FPGA program
- U.S. Department of Energy's National Nuclear Security Administration [DE-AC04-94AL85000]
Switching of transducer coupling in aluminum nitride contour-mode resonators provides an enabling technology for future tunable and reconfigurable filters for multi-function RF systems. By using microelectromechanical capacitive switches to realize the transducer electrode fingers, coupling between the metal electrode finger and the piezoelectric material is modulated to change the response of the device. On/off switched width extensional resonators with an area of < 0.2 mm(2) demonstrate a Q of 2000, K-2 of 0.72, and >24 dB switching ratio at a resonator center frequency of 635 MHz. Other device examples include a 63 MHz resonator with switchable impedance and a 470 MHz resonator with 127 kHz of fine center frequency tuning accomplished by mass loading of the resonator with the MEMS switches.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据