期刊
MICROSYSTEMS & NANOENGINEERING
卷 3, 期 -, 页码 -出版社
SPRINGERNATURE
DOI: 10.1038/micronano.2016.83
关键词
holographic optical tweezer; microassembly; microfabrication; microfluidics; optical assembly; screw connection; screw-wrench; two-photon polymerization
资金
- German Research Foundation DFG (Deutsche Forschungsgesellschaft) [OS 188/28-1]
For future micro- and nanotechnologies, the manufacturing of miniaturized, functionalized, and integrated devices is indispensable. In this paper, an assembly technique based on a bottom-up strategy that enables the manufacturing of complex microsystems using only optical methods is presented. A screw connection is transferred to the micrometer range and used to assemble screw- and nut-shaped microcomponents. Micro-stereolithography is performed by means of two-photon polymerization, and microstructures are fabricated and subsequently trapped, moved, and screwed together using optical forces in a holographic optical tweezer set-up. The design and construction of interlocking microcomponents and the verification of a stable and releasable joint form the main focus of this paper. The assembly technique is also applied to a microfluidic system to enable the pumping or intermixing of fluids on a microfluidic chip. This strategy not only enables the assembly of microcomponents but also the combination of different materials and features to form complex hybrid microsystems.
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