期刊
JOURNAL OF ASTRONOMICAL TELESCOPES INSTRUMENTS AND SYSTEMS
卷 3, 期 3, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.JATIS.3.3.034001
关键词
protected silver mirror; atomic layer deposition; aluminum oxide; corrosion barrier; reflective coatings
资金
- National Science Foundation [1005506, 1407353]
- Direct For Mathematical & Physical Scien
- Division Of Astronomical Sciences [1005506, 1407353] Funding Source: National Science Foundation
This work investigates intermediate materials deposited between silver (Ag) thin-film mirrors and an aluminum oxide (AlOx) barrier overlayer and compares the effects on mirror durability to environmental stresses. Physical vapor deposition of various fluorides, oxides, and nitrides in combination with AlOx by atomic layer deposition (ALD) is used to develop several coating recipes. Ag-AlOx samples with different intermediate materials undergo aggressive high-temperature (80 degrees C), high-humidity (80%) (HTHH) testing for 10 days. Reflectivity of mirror samples is measured before and after HTHH testing, and image processing techniques are used to analyze the specular surface of the samples after HTHH testing. Among the seven intermediate materials used in this work, TiN, MgAl2O4, NiO, and Al2O3 intermediate layers offer more robust protection against chemical corrosion and moisture when compared with samples with no intermediate layer. In addition, results show that the performance of the ALD-AlOx barrier overlayer depends significantly on the ALD-growth process temperature. Because higher durability is observed in samples with less transparent TiN and NiO layers, we propose a figure of merit based on post-HTHH testing reflectivity change and specular reflective mirror surface area remaining after HTHH testing to judge overall barrier performance. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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