Structural, electrical and optical properties of multilayer TiO2 thin films deposited by sol-gel spin coating

Titanium dioxide (TiO2) multilayer thin films having 1, 2, 3 and 4 layers have been deposited on glass substrate by using sol-gel spin coating technique. TiO2 has anatase crystal structure and the grain size is increased when the coating layers have been increased, according to XRD results. Four point probe measures the electrical properties showed that the average resistivity is decreased with increasing the stacked layers. Optical properties of the films were measured by UV-Vis spectroscopy which showed the high transmittance in the visible region. The optical band gap energies of 1, 2, 3 and 4 layers of TiO2 films were 3.65, 3.60, 3.59 and 3.40 eV, respectively. These properties showed that the multilayer films of TiO2 can be enhanced the properties of optoelectronic devices. (C) 2017 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license