期刊
MATERIALS RESEARCH EXPRESS
卷 4, 期 3, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/2053-1591/aa63c7
关键词
C12A7; electride; magnetron sputtering; work function
资金
- National Natural Science Foundation of China [61574144]
- Zhejiang Natural Science Foundation [LY15F040004]
- program for Ningbo Municipal Science and Technology Innovative Research Team [2015B11002]
- International S&T Cooperation Program of China (ISTCP) [2015DFH60240]
In this work, a high density (94%) and high electron concentration (2.3 x 1020 cm(-3)) doped C12A7 electride ceramic target for magnetron sputtering was prepared by directly heating the C12A7 nano powder to above its melting point. The effects of the temperature on the electron concentration was explored. Furthermore, a smooth (R-q = 0.6 nm), high transparent and low work function (Phi = 2.9 eV) C12A7 electride thin film was deposited via magnetron sputtering. This result provides a suitable route for the fabrication of large-scale C12A7 electride film and has a bright prospect for application in optoelectronic devices.
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