期刊
NANOMATERIALS
卷 7, 期 6, 页码 -出版社
MDPI
DOI: 10.3390/nano7060126
关键词
electrodeposition; EMD; thin film; carbon; 3D current collector; microbatteries
类别
资金
- Flemish Instituut voor Innovatie door Wetenschap en Technologie IWT through the Strategisch Basisonderzoek SBO project SOS-Lion [2012/5416]
In this work, we present the electrochemical deposition of manganese dioxide (MnO2) thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD), is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO2 (EMD) coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li+ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications.
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