期刊
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
卷 71, 期 2, 页码 -出版社
EDP SCIENCES S A
DOI: 10.1051/epjap/2015150026
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The high current diffuse dielectric barrier discharge (DBD) was operated in a bi-axial cylindrical electrode configuration using nitrogen, oxygen and argon gas flow with the addition of tetraethyl orthosilicate as precursor for silica-like film deposition. The behaviour of the transient plasma was visualized by means of fast imaging from two orthogonal directions. The formation and propagation (similar to 3 x 10(4) m s(-1)) of lateral ionization waves with the transverse light emission structure similar to the low pressure glow discharge was observed at time scales below 1 mu s. Despite plasma non-uniformity at nanosecond time scale the deposition process on the web-rolled polymer results in smooth well adherent films with good film uniformity and excellent gas diffusion barrier properties.
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