期刊
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016
卷 168, 期 -, 页码 864-867出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.proeng.2016.11.292
关键词
ZnO; piezoelectric nanowires; pressure sensor; finite element model; piezoelectric signals; polymer encapsulation; Young's modulus
This work presents results of finite element analysis of an array of ZnO nanowires with bottom-bottom electrode configuration, which are integrated onto a multi-layer chip stack and encapsulated within a polymer. The dynamically-deformed array constitutes a representative part of a high-resolution pressure sensor intended for reliable identification of the smallest fingerprint features such as shape of the ridges and pores. Parametric study was performed in order to predict the most rational values of the Young's modulus and thickness of the encapsulation layer in terms of magnitude and variability of the piezoelectric signals. The results also demonstrate the impact of nanowire aspect ratio and load orientation on the generated electrical signals. (C) 2016 The Authors. Published by Elsevier Ltd.
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