期刊
出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.phpro.2016.11.036
关键词
deep X-ray lithography; X-ray mask; central beamstop; X-ray Lithographer
资金
- Russian Science Foundation [14-50-00080]
The multifunctional X-ray lithography LIGA station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center Siberian Synchrotron and Terahertz Radiation Center (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented. (C) 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
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