期刊
NANO ENERGY
卷 35, 期 -, 页码 415-423出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nanoen.2017.04.012
关键词
Wafer-scale; Sub-50 nm grating; Triboelectric nanogenerator; Electrode conducting effect; Nanopattern flattening
类别
资金
- Korea-Sweden research cooperation program - Ministry of Science, ICT and Future Planning (MSIP) through the National Research Foundation of Korea (NRF) [2014R1A2A1A12067558]
- Global Frontier R & D Program on Center for Integrated Smart Sensors - Ministry of Science, ICT and Future Planning (MSIP) through the National Research Foundation of Korea (NRF) [CISS-2016M3A6A6929958]
- National Research Foundation of Korea [2014R1A2A1A12067558] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Herein, we report a triboelectric nanogenerator (TENG) with improved performance using extremely-long sub-50 nm grating patterns with high aspect ratio (4,000,000: 1) fabricated by the multistep pattern downscaling (MS-PaD) method, which is advantageous in terms of fast throughput, high resolution, cost-effectiveness, industrial compatibility, and large-area scalability in nanofabrication. The intensely-arrayed nanograting pattern is replicated to the flexible substrate on the 8-in. wafer-scale without any defects for the nanograting-assisted TENG (NGTENG). As the well-aligned nanoscale morphology in sub-50 nm grating leads to efficient triboelectric charges, the NGTENG shows an outstanding performance enhancement by a factor of 200 compared to non-patterned surface during repetitive contact electrification. To demonstrate capability of self-powered electronics, the output power from the NGTENG is directly used for charging a commercial capacitor and turning on the LEDs. In addition, theoretical study of triboelectric signals according to nanoscale-tuned metal electrodes were investigated to improve the effective output and robustness of triboelectric device.
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