期刊
MICROMACHINES
卷 8, 期 10, 页码 -出版社
MDPI
DOI: 10.3390/mi8100296
关键词
disk resonator gyroscope (DRG); quality factor (Q); finite element method (FEM); frequency split
类别
资金
- National Natural Science Foundation [61571127]
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, China [KL201102]
- Major Project Guidance Foundation of Basic Scientific Research Operation Expenses, Southeast University [3222003104]
- Aeronautical Science Foundation of China [20160869004]
In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split and Q value were concluded with the help of the FEM software. Meanwhile, devices with different parameters were designed, fabricated, and tested, and the experimental result was in accordance with the simulation. With the proposed methods, the DRG was selected with a high Q value and a low frequency split to satisfy the demand of high performance. The weakness and future works were pointed at last.
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