期刊
MICROMACHINES
卷 8, 期 10, 页码 -出版社
MDPI AG
DOI: 10.3390/mi8100289
关键词
micro-electro-mechanical system (MEMS) mirror; bimorph; electro-thermal actuator; resonance frequency; thermal modelling; overshoot; ringing
类别
资金
- National Natural Science Foundation of China [61574016, 61404008]
- 111 project of China [B14010]
- US National Science Foundation [1512531]
Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by properly designing the thermal response time and the mechanical resonance without using any open-loop or closed-loop control. Electrothermal and thermomechanical lumped-element models are established. According to the analysis, when setting the product of the thermal response time and the fundamental resonance frequency to be greater than Q/2, the mechanical overshoot and oscillation caused by a step signal can be eliminated effectively. This method is verified experimentally with fabricated electrothermal bimorph MEMS mirrors.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据