期刊
APPLIED PHYSICS LETTERS
卷 110, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4973927
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资金
- U.S. Department of Homeland Security, Domestic Nuclear Detection Office [ECCS-1348269, 2013-DN-077-ER001]
This paper reports on the device processing and characterization of hexagonal boron nitride (hBN) based solid-state thermal neutron detectors, where hBN thickness varied from 2.5 to 15 mu m. These natural hBN epilayers (with 19.9% B-10) were grown by a low pressure chemical vapor deposition process. Complete dry processing was adopted for the fabrication of these metal-semiconductor-metal (MSM) configuration detectors. These detectors showed intrinsic thermal neutron detection efficiency values of 0.86%, 2.4%, 3.15%, and 4.71% for natural hBN thickness values of 2.5, 7.5, 10, and 15 mu m, respectively. Measured efficiencies are very close (>= 92%) to the theoretical maximum efficiencies for corresponding hBN thickness values for these detectors. This clearly shows the hBN thickness scalability of these detectors. A 15 lm thick hBN based MSM detector is expected to yield an efficiency of 21.4% if enriched hBN (with similar to 100% B-10) is used instead of natural hBN. These results demonstrate that the fabrication of hBN thickness scalable highly efficient thermal neutron detectors is possible. Published by AIP Publishing.
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