期刊
APPLIED SURFACE SCIENCE
卷 395, 期 -, 页码 172-179出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2016.08.125
关键词
TiO2 thin films; Magnetron sputtering; Anatase; Rutile; Bias voltage
类别
资金
- Ministry of High Education and Scientific Research of Algeria (MESRS/FNR)
TiO2 thin films are of paramount importance due to their pervasive applications. In contrast to previous published works where the substrate was heated at high temperatures to obtain TiO2 crystalline phase, we show in this study that it is possible to deposit crystalline TiO2 thin films on biased and unbiased substrate at room temperature using reactive rf magnetron sputtering. The bias voltage was varied from OV to -100V. The deposited films were characterized using X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), UV-vis spectroscopy, Raman spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and atomic force microscopy (AFM). The average crystallite size was estimated using x-ray diffraction. The results showed that the application of negative bias affects the surface roughness of the films and favors the formation of the rutile phase. The root mean square roughness (R-rms), the average grain size and the optical band gap of the films decreased as the substrate bias voltage was varied from 0 to -100 V. The UV-visible transmittance spectra showed that the films were transparent in the visible range and absorb strongly in the UV range. This study shows that biasing the substrate could be a promising and effective alternative to deposit TiO2 crystallized thin films of engineered properties at room temperature. (C) 2016 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据