期刊
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
卷 6, 期 5, 页码 M55-M59出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/2.0141705jss
关键词
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资金
- European Commission through the GRADE project [317839]
- Julich Supercomputing Center of the John von Neumann Institute for Computing [hfo06]
We review some of the recent results obtained on the graphene synthesis on Ge(100)/Si(100) substrates by molecular beam epitaxy and wafer scale chemical vapor deposition. We outline some of the identified challenges in synthesis and present first experimental results on patterning and in-line metrology of graphene in a 200 mm wafer pilot line. (C) 2017 The Electrochemical Society.All rights reserved.
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