期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 27, 期 4, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/aa5dfb
关键词
gray-scale lithography; polymer MEMS; maskless lithography; electrostatic actuation; rapid microfabrication; SU-8; sacrificial-layer free
We report novel low-cost and rapid fabrication technologies for the fabrication of movable polymer-based MEMS structures, electrically actuated. Using SU-8 photoresist as structural material, both ordinary and functionalized by conductive fillers (nano-Ag particles and carbon nanotubes), the novel fabrication methods provide simple processes, without the use of any sacrificial layer, for achieving suspended structures (beams and membranes) through either binary or gray-scale photolithography. Experimental validation has demonstrated high yields (over 99% for one of the process flows) in achieving electrostatically actuated microstructures with resonant frequencies in the 0.5-0.8 MHz range, with a stable dynamic behavior tested for a period longer than three months. The technology also confirms that 'doping' SU-8 with conductive fillers can preserve its photo-patterning capabilities, while modifying other physical properties (electrical conductivity). As the patterning of SU-8 films can take place on either rigid or flexible substrates, this low-cost technology promises a wide range of applications.
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