期刊
AIP ADVANCES
卷 7, 期 11, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4999246
关键词
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资金
- National Key Basic Research Program of China [2015CB057402]
- 111 Project of China [B14040]
- International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies
In2O3/ITOthin film thermocouples for high temperature measurement (up to 1250 degrees C) were prepared by radio frequency magnetron sputtering method with different annealing temperatures from 1100 degrees C to 1250 degrees C. The changes with microstructure characteristics and the thickness of the thin film thermocouples were investigated as a function of sintering temperature in the range of 1100 degrees C - 1250 degrees C and annealing time from 2 hrs to 10 hrs at 1200 degrees C by using XRD and SEM techniques. The thermoelectric outputwas measured and its results indicated that this thermocouple had a steady and constant voltage output from room temperature to 1247 degrees C. The thermoelectric voltage and Seebeck coefficient of In2O3/ITOthermocouples measured at 1247 degrees C were 166.7mV and 136.3 mu V/degrees C, respectively. (C) 2017 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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