期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 26, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/aa6bdf
关键词
molecular data; electron collisions; etching plasma
资金
- Quantemol Ltd.
- Science and Technology Facilities Council [1353011] Funding Source: researchfish
Electron impact cross sections sets are constructed for the nitrogen trifluoride, nitrogen difluoride and nitrogen monofluoride molecules. These cross sections are based on ab initio R-matrix calculations augmented by other procedures. Cross sections are presented for elastic collisions, momentum transfer, dissociative electron attachment, electron impact dissociation, ionisation and dissociative ionisation. For NF process occurring via the metastable a (1)Delta and b (1)Sigma(+) states are also considered. A semi-empirical method of estimating the products of electron impact ionisation is proposed and tested for ammonia. The cross sections are extended to high energy where appropriate. The cross section set constructed is tested in a global model simulation of a low pressure, inductively coupled plasma based on a Ar/NF3/O-2 initial gas mixture.
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