Orientation-dependent electro-optical response of BaTiO3 on SrTiO3-buffered Si(001) studied via spectroscopic ellipsometry

To design a high performance BaTiO3 (BTO)-integrated Si modulator, understanding how BTO domain orientations influence its electro-optical (EO) properties is crucial. The 100-nm-thick BTO films with c-oriented and a-oriented domains are obtained by exploiting various thickness of SrTiO3 buffer layers grown on Si(001) substrates. Then, the electro-optical behavior for 2 differently oriented samples is analyzed using spectroscopic ellipsometry. (C) 2017 Optical Society of America