期刊
CERAMICS INTERNATIONAL
卷 43, 期 13, 页码 10386-10391出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2017.05.073
关键词
Ti-doped; SnO2; Sensing membrane
资金
- Chang Gung University [CMRPD2F0091]
- Ministry of Science and Technology [MOST 104-2221-E-182-042]
We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 degrees C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据