期刊
JOURNAL OF MOLECULAR AND ENGINEERING MATERIALS
卷 5, 期 1, 页码 -出版社
WORLD SCIENTIFIC PUBL CO PTE LTD
DOI: 10.1142/S2251237317500046
关键词
Ru-doped ZnO films; sol-gel method; sheet resistance; I-V characteristics
Nanocrystalline ruthenium (Ru)-doped ZnO thin films on sapphire substrate was prepared using sol-gel method by spin coating technique. The structural and I-V characteristics of Ru doped ZnO thin films were studied from the X-ray di r raction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM) analysis and Raman spectroscopy. X-ray di r raction (XRD) results revealed that the deposited films belonged to hexagonal wurtzite structure with c-axis orientation. It is also con firmed from the Raman spectra. Enhancement of longitudinal optical (LO) phonon is observed by the strong electron-phonon interaction. An observed increment in sheet resistance with increase in dopant percentage of Ru (1-2 mol%) in ZnO films was found and better I-V characteristic behavior was observed at 1 mol% of Ru-doped ZnO thin films. Trap limited current flow inside the material was calculated from the log I versus log V plot in the higher voltage region.
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