期刊
ADVANCED MATERIALS
卷 29, 期 32, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201700595
关键词
block copolymers; directed self-assembly; flash light; photothermal effects
类别
资金
- National Creative Research Initiative (CRI) Center for Multi-Dimensional Directed Nanoscale Assembly [2015R1A3A2033061]
- Grobal Frontier Hybrid Interface Materials (GFHIM) [2013M3A6B1078874]
- Nano-Material Technology Development Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT and Future Planning [2016M3A7B4905613]
- Creative Materials Discovery Program [NRF-2016M3D1A1900035]
- National Research Foundation of Korea [2016M3D1A1900035, 2016M3A7B4905621, 2016M3A7B4905613, 2015R1A3A2033061, 2013M3A6B1078874] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
One of the fundamental challenges encountered in successful incorporation of directed self-assembly in sub-10 nm scale practical nanolithography is the process compatibility of block copolymers with a high Flory-Huggins interaction parameter (chi). Herein, reliable, fab-compatible, and ultrafast directed self-assembly of high-chi block copolymers is achieved with intense flash light. The instantaneous heating/quenching process over an extremely high temperature (over 600 degrees C) by flash light irradiation enables large grain growth of sub-10 nm scale self-assembled nanopatterns without thermal degradation or dewetting in a millisecond time scale. A rapid self-assembly mechanism for a highly ordered morphology is identified based on the kinetics and thermodynamics of the block copolymers with strong segregation. Furthermore, this novel self-assembly mechanism is combined with graphoepitaxy to demonstrate the feasibility of ultrafast directed self-assembly of sub-10 nm nanopatterns over a large area. A chemically modified graphene film is used as a flexible and conformal light-absorbing layer. Subsequently, transparent and mechanically flexible nanolithography with a millisecond photothermal process is achieved leading the way for roll-to-roll processability.
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