期刊
IEEE SENSORS LETTERS
卷 1, 期 5, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LSENS.2017.2756108
关键词
Mechanical sensors; accelerometers; cross-axis sensitivity; differential capacitance; mode spacing; sensitivity
资金
- Mubadala Development Company, Abu Dhabi
- Economic Development Board-Singapore
- GLOBALFOUNDRIES, Singapore
- A*STAR Institute of Microelectronics, Singapore (IME)
- Masdar Institute of Science and Technology, Abu Dhabi
We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97 fF/g (g = 9.8 m/s(2)) over +/- 10 g range with a pull-in voltage of 6 V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm x 1.6 mm using GlobalFoundries' Inertial Measurement Unit (IMU) platform.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据