期刊
ACS APPLIED MATERIALS & INTERFACES
卷 9, 期 41, 页码 35947-35957出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.7b07428
关键词
piezoelectric films; nanosheets; ultralow expansion glass; microstructure; ultrahigh piezoelectricity
资金
- Research Program of the Materials innovation institute (M2i) [M62.3.10404]
- Nano-NextNL a micro and nanotechnology consortium of the Government of The Netherlands and 130 partners
Nanosheet Ca2Nb3O10 (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir Blodgett method to obtain preferential (001) oriented growth of Pb(Zr0.52Ti0.48)O-3 (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar gMin structure, which helps to increase the longitudinal piezoelectric coefficient (d(33f)). An enhanced d(33f) value of 356 pm V-1 was obtained for 2-mu m-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.
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