期刊
APPLIED SURFACE SCIENCE
卷 426, 期 -, 页码 399-405出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2017.07.160
关键词
Femtosecond laser; Ultrasonic vibration polishing; Cemented carbide; Microcrater; Surface topography
类别
资金
- Fundamental Research Funds for the Central Universities from Beihang University [74003401]
- Beijing Natural Science Foundation [3162019]
- National Key Basic Research Program of China [2015CB059900]
- National Program of Key Research in Additive Manufacturing and Laser Manufacturing of China [2016YFB1102503]
Rough surface features induced by laser irradiation have been a challenging for the fabrication of micro/nano scale features. In this work, w e propose hybrid ultrasonic vibration polishing method to improve surface quality o f microcraters produced by femtosecond laser irradiation on cemented carbide. The laser caused rough surfaces are significantly smoothened after ultrasonic vibration polishing due to the strong collision effect o f diamond particles on the surfaces. 3D morphology, SEM and AFM analysis has been conducted to characterize surface morphology and topography. Results indicate that the minimal surface roughness o f Ra 7.60 nm has been achieved on the polished surfaces. The fabrication of microcraters with smooth surfaces is applicable to molding process for mass production o f micro-optical components. (C) 2017 Published by Elsevier B.V.
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