期刊
ULTRASONICS
卷 78, 期 -, 页码 162-165出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultras.2017.01.014
关键词
Diamond; Piezoelectric layered structure; HBAR; Aluminum nitride; Quality factor; Quality parameter; UHF acoustic attenuation
资金
- Russian Science Foundation - Russia [16-12-10293]
- Russian Science Foundation [16-12-10293] Funding Source: Russian Science Foundation
First ultrahigh frequency (UHF) investigation of quality factor Q for the piezoelectric layered structure << Al/(001)AlN/Mo/(100) diamond has been executed in a broad frequency band from 1 up to 20 GHz. The record-breaking Q.f quality parameter up to 2.7 . 10(14)Hz has been obtained close to 20 GHz. Frequency dependence of the form factor m correlated with quality factor has been analyzed by means of computer simulation, and non-monotonic frequency dependence can be explained by proper features of thin-film piezoelectric transducer (TFPT). Excluding the minimal Q magnitudes measured at the frequency points associated with minimal TFPT effectiveness, one can prove a rule of Of similar to f observed for diamond on the frequencies above 1 GHz and defined by Landau-Rumer's acoustic attenuation mechanism. Synthetic IIa-type diamond single crystal as a substrate material for High-overtone Bulk Acoustic Resonator (HBAR) possesses some excellent acoustic properties in a wide microwave band and can be successfully applied for design of acoustoelectronic devices, especially the ones operating at a far UHF band. (C) 2017 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据