期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 27, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/aa6ad4
关键词
optrode; neural probe; optogenetic; laser diode; waveguide; integrated light source
类别
资金
- BrainLinks-Brain Tools, Cluster of Excellence - German Research Foundation (DFG) [EXC 1086]
We report on a compact optrode, i.e. a MEMS-based, invasive, bidirectional neural interface allowing to control neural activity using light while neural signals are recorded nearby. The optrode consists of a silicon (Si) base carrying two pairs of bare laser diodes (LDs) emitting at 650 nm and of two 8 mm-long, 250 mu m-wide and down to 50 mu m-thick shanks extending from the base. Each LD is efficiently coupled to one of four 15 or 20 mu m-wide and 13 mu m-high SU-8 waveguides (WGs) running in pairs along the shanks. In addition, each shank comprises four 20 mu m-diameter platinum electrodes for neural recording near the WG end facets. After encapsulation of the LDs with a Si cover chip blocking stray light and protecting the LDs from the harsh environment to which the probe is destined, the compact base measures only 4 x 4 x 0.43 mm(3). The time averaged radiant emittance at the WG end facet is 96.9 mW mm(-2) for an LD current of 35 mA at a duty cycle of 5%. The absolute electrode impedance at 1 kHz is 1.54 +/- 0.06 M Omega. Using infrared thermography, the temperature increase of the probe during LD operation was determined to be about 1 K under neuroscientifically relevant operating conditions.
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