期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 50, 期 44, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6463/aa87a1
关键词
negative oxygen ion; DC magnetron sputtering; ITO sputter; calorimetry method; heat flux; absolute evaluation of particle flux; QMA
O- ion flux from the indium tin oxide (ITO) sputter target under Ar ion bombardment is quantitatively evaluated using a calorimetry method. Using a mass spectrometer with an energy analyzer, O- energy distribution is measured with spatial dependence. Directional high-energy O- ion ejected from the target surface is observed. Using a calorimetry method, localized heat flux originated from high-energy O- ion is measured. From absolute evaluation of the heat flux from O- ion, O- particle flux in order of 10(18) m(-2) s(-1) is evaluated at a distance of 10 cm from the target. Production yield of O- ion on the ITO target by one Ar+ ion impingement at a kinetic energy of 244 eV is estimated to be 3.3 x 10(-3) as the minimum value.
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