期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 27, 期 11, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/aa8ae0
关键词
respiration sensors; surface acoustic wave; obstructive sleep apnea syndrome monitoring
类别
资金
- National Natural Science Foundation of China [U1613202, U1609210, 61376118]
- Zhejiang Science and Technology [2016C31061]
- Fundamental Research Funds for Central Universities [2016QNA5005]
- 'Electronic Science and technology'-Zhejiang Open Foundation of the Most Important Subjects
- Canada Research Chair Program
Obstructive sleep apnea syndrome (OSAS) has received much attention in recent years due to its significant harm to human health and high morbidity rate. A respiration monitoring system is needed to detect OSAS, so that the patient can receive treatment in a timely manner. Wired and wireless OSAS monitoring systems have been developed, but they require a wire connection and batteries to operate, and they are bulky, heavy and not user-friendly. In this paper, we propose the use of a flexible surface acoustic wave (SAW) microsensor to detect and monitor OSAS by measuring the humidity change associated with the respiration of a person. SAW sensors on rigid 128 degrees YX LiNbO3 substrate are also characterized for this application. Results show both types of SAW sensors are suitable for OSAS monitoring with good sensitivity, repeatability and reliability, and the response time and recovery time for the flexible SAW sensors are 1.125 and 0.75 s, respectively. Our work demonstrates the potential for an innovative flexible microsensor for the detection and monitoring of OSAS.
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