期刊
APPLIED PHYSICS LETTERS
卷 111, 期 16, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4997773
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资金
- U.S. Department of Energy (DOE), Office of Basic Energy Sciences (BES), Materials Science and Engineering Division
- DOE, Basic Energy Sciences [DE-AC02-06CH11357]
- DOE Office of Science by Brookhaven National Laboratory [DE-SC0012704]
We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films. Published by AIP Publishing.
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