期刊
THIN SOLID FILMS
卷 642, 期 -, 页码 157-162出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2017.09.037
关键词
Thermal conductivity; Thermal diffusivity; Interfacial thermal resistance; Frequency domain photoreflectance; Atomic layer deposition
类别
资金
- European Union Seventh Framework Program FP7-NMP-LARGE-7 [8604668]
In this work, we report on the measurement of the thermal conductivity of thin insulating films of SiO2 obtained by thermal oxidation, and Al2O3 grown by atomic layer deposition (ALD), both on Si wafers. We used photo-reflectance microscopy to determine the thermal properties of the films as a function of thickness in the 2 nm to 1000 nm range. The effective thermal conductivity of the Al2O3 layer is shown to decrease with thickness down to 70% for the thinnest layers. The data were analyzed upon considering that the change in the effective thermal conductivity corresponds to an intrinsic thermal conductivity associated to an additional interfacial thermal resistance. The intrinsic conductivity and interfacial thermal resistance of SiO2 were found to be equal to 0.95 W/m.K and 5.1 x 10(-9)m(2)K/W respectively; those of Al2O3 were found to be 1.56 W/m.K and 4.3 x 10(-9)m(2)K/W.
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