期刊
THIN SOLID FILMS
卷 638, 期 -, 页码 383-388出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2017.08.006
关键词
High-entropy alloy; Nanocrystalline; Thin film coating; Synchrotron X-ray scattering; Mechanical properties
类别
资金
- National Natural Science Foundation of China [51301147]
- Shenzhen Basic Research [JCYJ20160401100358589, JCYJ20170302142339007]
- Natural Science Foundation of Shenzhen University [2017069]
- U.S. Department of Energy (DOE) Office of Science User Facility operated for the DOE Office of Science by Argonne National Laboratory [DE-ACO2-06CH11357]
High-entropy CoCrFeNiAl0.3 alloy thin films were prepared by magnetron sputtering technique. The thin film surface was very smooth and homogeneous. The synchrotron X-ray experiment confirmed that (111) type of texture existed in the thin film, and the structure was face-centered cubic nanocrystals with a minor content of ordered NiAl-type body-centered cubic structures. Interestingly, the elastic modulus of the thin film was nearly the same to the bulk single-crystal counterpart, however, the nanohardness is about four times of the bulk single crystal counterpart. It was found that the high hardness was due to the formation of nanocrystal structure inside the thin films and the preferred growth orientation, which could be promising for applications in micro fabrication and advanced coating technologies. (C) 2017 Elsevier B.V. All rights reserved.
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