期刊
出版社
IOP PUBLISHING LTD
DOI: 10.1088/1742-6596/917/6/062030
关键词
-
资金
- Russian Science Foundation [14-22-00143]
The fabrication of the periodic structures, that is two-dimensional photonic crystals (2D PhCs) based on Si-materials by electron beam lithography (EBL) technique has been studied. We have investigated basic lithography processes such as des igning, exposition, development, etching and others. The developed top-down approach allows close-packed arrays of elements and holes to be formed in nanometre range. This can be used to produce 2D PhCs with emitting micro-cavities (missing holes) with lateral size parameters with an accuracy of about 2% in the Si (100) substrate and in silicon-on-insulator structures. Such accuracy is expected to be sufficient for obtaining the cavities -coupling radiation interference from large areas of 2D PhCs.
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