Scalable gas sensors fabrication to integrate metal oxide nanoparticles with well-defined shape and size

In this contribution, we propose and demonstrate a scalable and reproducible process to fabricate nano sized functional particles and integrate them in microelectromechanical systems. We use a wet-chemistry approach for nanoparticle synthesis in combination with inkjet printing as a production process for metal oxide based gas sensors. This method enables control over size and shape of the nanoparticles as well as an ordered and reproducible deposition of a monolayer of particles onto arbitrary microstructures. Here we present results obtained using copper oxide nanoparticles as well as their synthesis and material characterization. A total of 14 layers has been produced and the baseline resistivity as well as the gas sensitive response towards oxygen, humidity and nitrogen dioxide of each layer has been determined. (C) 2017 Elsevier B.V. All rights reserved.