期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 257, 期 -, 页码 58-64出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2017.02.006
关键词
Micro heater; Bio-calorimetry; Temperature uniformity; Polyimide membrane; Fast response
资金
- NSF (IDBR) [1530508]
- AbbVie Inc.
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-AC02-98CH10886]
- Direct For Biological Sciences
- Div Of Biological Infrastructure [1530508] Funding Source: National Science Foundation
MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature dependent measurements. In this paper we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. This design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving. (C) 2017 Elsevier B.V. All rights reserved.
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