期刊
SENSORS
卷 17, 期 8, 页码 -出版社
MDPI
DOI: 10.3390/s17081788
关键词
silicon photonics; mid-infrared; optical sensor; integrated spectrometer; spectroscopy
资金
- FP7-ERC-MIRACLE project - European Research Council
- FP7-ERC-PoC-FireSpec project - European Research Council
- FP7-ERC-InSpectra project - European Research Council
- CheckPack IWT project - Flemish government
- Research Foundation Flanders (FWO)
The availability of silicon photonic integrated circuits (ICs) in the 2-4 mu m wavelength range enables miniature optical sensors for trace gas and bio-molecule detection. In this paper, we review our recent work on III-V-on-silicon waveguide circuits for spectroscopic sensing in this wavelength range. We first present results on the heterogeneous integration of 2.3 mu m wavelength III-V laser sources and photodetectors on silicon photonic ICs for fully integrated optical sensors. Then a compact 2 mu m wavelength widely tunable external cavity laser using a silicon photonic IC for the wavelength selective feedback is shown. High-performance silicon arrayed waveguide grating spectrometers are also presented. Further we show an on-chip photothermal transducer using a suspended silicon-on-insulator microring resonator used for mid-infrared photothermal spectroscopy.
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