期刊
SENSORS
卷 17, 期 7, 页码 -出版社
MDPI
DOI: 10.3390/s17071548
关键词
metallic nanostructures; biosensors; Fano resonance; hot-embossing; radio-frequency heating; template-stripping
资金
- Ministry of Science and Technology, Taipei, Taiwan [MOST105-2627-B-001-001, 104-2112-M-001-040-MY2, 103-2221-E-001-013-MY3]
We propose two approacheshot-embossing and dielectric-heating nanoimprinting methodsfor low-cost and rapid fabrication of periodic nanostructures. Each nanofabrication process for the imprinted plastic nanostructures is completed within several seconds without the use of release agents and epoxy. Low-cost, large-area, and highly sensitive aluminum nanostructures on A4 size plastic films are fabricated by evaporating aluminum film on hot-embossing nanostructures. The narrowest bandwidth of the Fano resonance is only 2.7 nm in the visible light region. The periodic aluminum nanostructure achieves a figure of merit of 150, and an intensity sensitivity of 29,345%/RIU (refractive index unit). The rapid fabrication is also achieved by using radio-frequency (RF) sensitive plastic films and a commercial RF welding machine. The dielectric-heating, using RF power, takes advantage of the rapid heating/cooling process and lower electric power consumption. The fabricated capped aluminum nanoslit array has a 5 nm Fano linewidth and 490.46 nm/RIU wavelength sensitivity. The biosensing capabilities of the metallic nanostructures are further verified by measuring antigen-antibody interactions using bovine serum albumin (BSA) and anti-BSA. These rapid and high-throughput fabrication methods can benefit low-cost, highly sensitive biosensors and other sensing applications.
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