期刊
SENSORS
卷 17, 期 2, 页码 -出版社
MDPI
DOI: 10.3390/s17020389
关键词
accelerometer; ROTE; finite element modeling; sensitivity; bandwidth
资金
- National Natural Science Foundation of China [61501316, 61471255, 61474079, 51505324, 51622507]
- Basic Research Program of Shanxi for Youths [2014021023-3, 2015021092]
- Shanxi Scholarship Council of China [2015-047]
- 863 project [2015AA042601]
- Hundreds of Talents of Shanxi Province
Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 x 10(7) and 9 pm/g, respectively. The linear measurement range of the device is +/- 130 g. The work bandwidth obtained is located in 10- 500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors.
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