期刊
SENSORS
卷 17, 期 10, 页码 -出版社
MDPI
DOI: 10.3390/s17102422
关键词
microwave cavity perturbation; resonant frequency; radio frequency based gas sensors; zeolites; in operando spectroscopy
资金
- German Research Foundation (DFG)
- University of Bayreuth
A planar microstrip ring resonator structure on alumina was developed using the commercial FEM software COMSOL. Design parameters were evaluated, eventually leading to an optimized design of a miniaturized microwave gas sensor. The sensor was covered with a zeolite film. The device was successfully operated at around 8.5 GHz at room temperature as a humidity sensor. In the next step, an additional planar heater will be included on the reverse side of the resonator structure to allow for testing of gas-sensitive materials under sensor conditions.
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