期刊
NANOSTRUCTURED THIN FILMS X
卷 10356, 期 -, 页码 -出版社
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.2275894
关键词
guided-mode resonance; leaky-mode resonance; metamaterials; guided-mode resonant gratings; resonant waveguide gratings; leaky waves; resonant optical devices; sparse photonic lattices; bandpass filters
资金
- National Science Foundation [IIP-1444922, ECCS-1549851]
- Texas Instruments Distinguished University Chair in Nanoelectronics endowment
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1549851] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Industrial Innovation & Partnersh [1444922] Funding Source: National Science Foundation
We review properties of 1D and 2D resonant silicon metasurfaces based on fundamental electromagnetic resonance effects in thin periodic films. The spectral response upon transition from zero-contrast to high-contrast grating interfaces is explored. We discuss design and optimization with rigorous mathematical methods and review typical fabrication processes. New theoretical and experimental results for numerous devices are furnished. These include wideband reflectors and flat-top bandpass filters with multi-module resonant structures. The guided-mode resonance concept applies in all spectral regions, from the visible band to the microwave domain, with available low-loss materials.
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