期刊
ADVANCED MATERIALS
卷 30, 期 1, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201703772
关键词
lithium-ion batteries; microelectronics; photopatternable electrolytes; solid-state electrolytes
类别
资金
- Office of Naval Research
One of the important considerations for the development of on-chip batteries is the need to photopattern the solid electrolyte directly on electrodes. Herein, the photopatterning of a lithium-ion conducting solid electrolyte is demonstrated by modifying a well-known negative photoresist, SU-8, with LiClO4. The resulting material exhibits a room temperature ionic conductivity of 52 mu S cm(-1) with a wide electrochemical window (>5 V). Half-cell galvano-static testing of 3 mu m thin films spin-coated on amorphous silicon validates its use for on-chip energy-storage applications. The modified SU-8 possesses excellent mechanical integrity, is thermally stable up to 250 degrees C, and can be photopatterned with micrometer-scale resolution. These results present a promising direction for the integration of electrochemical energy storage in microelectronics.
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